Nanoscale Friction Behaviors of Hierarchical Superhydrophobic Structure of Diamond-like Carbon Films with Various Humidity Conditions

抄録

Superhydrophobic double roughening structure of DLC film was prepared by 2.45 GHz surface wave-excited plasma CVD with the mixture of methane (CH₄) and tetramethylsilane (TMS: Si(CH₃)₄) gases on the undulated DLC film by a series of plasma Ar etching, coating process and plasma Ar etching. Static wetting angle of water was observed that double roughening structure of DLC was superhydrophobicity such as wetting angle 161°. This approach also increased in air pockets easily trap among the needle-like posts. For the low friction at nanoscale, the surface wettability of the solid lubrication played a significant role, when the DLC film modified from flat to double roughening structure, the friction was constantly inner humidity conditions. Results generally showed that humidity had insignificant effect on the nanoscale friction at superhydrophobic DLC surface. The effect of the superhydrophobic double roughening DLC and friction were discussed with the following factors; the surface morphology affinity to needle-like shape, a reduction of the real area of contact, graphitization and easily occur to slip at small contact interface due to superhydrophobicity.