Ultrasonic vibration-assisted machining of chemically strengthened glass with workpiece bending

抄録

This paper deals with axial ultrasonic vibration-assisted machining with workpiece bending. It was proposed as a novel machining method for the reduction of the chippings at the machined holes during micro through-hole drilling of chemically strengthened glass. In micro through-hole drilling of chemically strengthened glass, machining accuracy and efficiency tend to be low because the material's high hardness and brittleness cause rapid tool wear and large chippings at the inlet and outlet of the machined holes. In order to machine small holes with high accuracy, the reduction of the tensile stress that causes large chippings at the outlet of the machined holes is an issue of primary importance that deserves investigation. In the proposed machining method, the glass plate is bent slightly to be convex upward through the application of a compressive stress at the posterior surface of chemically strengthened glass, with a specially designed jig. Using this proposed method that can reduce the tensile stress, the chipping size at the outlet of the machined holes was successfully reduced with applied compressive stress values of 38.9 MPa. In conclusion, it has been clear that the axial ultrasonic vibration-assisted machining with workpiece bending has the potential for achieving high-precision and high-efficiency machining for chemically strengthened glass.