A series of experiments was carried out to prepare the ultrafine particle of titanium oxide using gas phase chemical reactions. The effect of reaction conditions, such as the kind of the oxidizing agent, oxygen or water vapor, the partial preessure of TiCl4 vapor and the reaction temperature, was investigated.
The identification, mean size, size distribution and shape of particles were studied by X-ray diffraction and T. E. M observation.
The products were identified as titanium dioxide both anatase and rutile, white in color, several tens to hundreds of nm in size, spherelike and flakelike in shape. The average size of oxide particles becomes smaller with smaller PTiCl4 and higher temperature.
