2005 年 20 巻 2 号 p. 103-107
Monodispersed silicon nanoparticles with high crystallinity were successfully synthesized by a continuous system of pulsed-laser ablation, in-situ annealing and a size classification using differential mobility analyzer. Transmission electron microscopy and Raman scattering measurement revealed that the in-situ annealing was effective in improving both morphological uniformity and crystallinity of the nanoparticles. The silicon nanoparticles showed clearly size-dependent photoluminescence in near IR and visible region at room temperature, due to the quantum confinement effect. The full-width at the half-maximum of the PL spectrum was as narrow as 200 meV reflecting the sharp size distribution of the emitting particles.