エアロゾル研究
Online ISSN : 1881-543X
Print ISSN : 0912-2834
ISSN-L : 0912-2834
特集「エアロゾルプロセスによるナノ機能材料の合成とその制御」
透過電子顕微鏡法を用いた気相合成ナノ粒子の構造評価
村山 光宏瀬戸 章文
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2005 年 20 巻 2 号 p. 123-128

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A framework is presented for understanding the performance of modern analytical and high-resolution microscopy techniques, which are applicable to nano scale particle evaluation. With sub-nano meter spatial resolution, modern microscopy techniques could provide critical feedbacks on the fabrication processes, for example, direct measurement of particle size and its distribution, morphology, crystallinity and surface condition of nano particles. This paper discusses the practical application of modern microscopy techniques to laser-synthesized ultra-fine silicon and iron particles, i.e., the structural evaluation and the direct quantitative chemical analysis of surface oxide layer on nano particles.

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© 2005 日本エアロゾル学会
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