2016 Volume 31 Issue 2 Pages 89-95
In recent years, reduction of initial and running costs of industrial cleanroom is becoming more important because of the price competition of the products. There are previous reports on the cleanroom in which local clean environment near the production area was achieved while simplifying building finish and facilities system as a technique which is not possible by the conventional concept.
This paper is the outline of comparison of CFD and experiment between conventional and ceilingless cleanroom in the non-unidirectional airflow cleanroom. Furthermore, we added a system which can change air flow volume according to the particle concentration, and evaluated the effectiveness in energy-saving by the experiments. As a result, we confirmed that the cleanliness of the ceilingless Cleanroom II was comparable to the conventional system, and that it is possible to reduce air flow volume of FFU while keeping the same cleanliness.
