2016 Volume 31 Issue 4 Pages 259-265
Fabrication of porous ceramic thin films with unique microstructures was carried out by using an electrostatic spray deposition (ESD) process, which is one of the effective thin film preparation techniques through aerosol processes. The deposition process parameters, such as the substrate temperature, the distance between substrate and tip of nozzle and the solvent compositions were changed systematically to examine their effects on film morphology. As a result, it was demonstrated that this technique was useful for the production of electrode films for lithium-ion batteries and electrode and electrolyte films for solid oxide fuel cell (SOFC).