Journal of The Japan Society of Microgravity Application
Print ISSN : 0915-3616
A Diagnostic Study of Plasma CVD under Microgravity and its Application to Diamond Deposition
Masamichi ISHIKAWA
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JOURNAL OPEN ACCESS

1999 Volume 16 Issue 1 Pages 45-

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Abstract

Diamond thin-film was synthesized under microgravity using Japanese free-flyer (SFU, Space Flyer Unit) launched in March 1995. This program achieved the first space-based production of dia­mond by Chemical Vapor Deposition (CVD). The DC plasma excitation method was applied to hydrogen-methane mixed gas within the pressure range of 2.66~6.55 X 103 Pa. Remarkable differences of the electron temperature of hydrogen plasma were confirmed between the microgravity and the on-ground experiments. The intensity ratio of CH/Ha measured by emission spectroscopy was found as a sensitive indicator of gravity effects on gaseous chemistry and diamond quality.

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© 1999 The Japan Society of Microgravity Application
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