Record of Joint Conference of Electrical and Electronics Engineers in Kyushu
Record of 2008 Joint Conference of Electrical and Electronics Engineers in Kyushu
Session ID : 04-2P-19
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Host: Joint Conference of Electrical and Electronics Engineers in Kyushu

Behavior of Arc Spot in Magnetron Cathode with AZO Target
Kazuki Komine, Taichi Sakamoto, Ryouji Kan, Tadashi Iwata, Masanori Shinohara, Yoshinobu Matsuda
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[in Japanese]
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© 2008 Committee of Joint Conference of Electrical and Electronics Engineers in Kyushu
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