One-step Preparation of BaTiO₃ Nanoparticles by Liquid Source Chemical Vapor Deposition

Abstract

Barium titanate (BaTiO₃) nanoparticles were prepared by means of a liquid source chemical vapor deposition method under atmospheric pressure. The effects of precursor composition, concentration, operating temperature, and residence time in the hot zone on the surface morphology, composition, and crystallinity of the resulting particles were investigated. By increasing the Ba/Ti ratio in the precursor, the amount of TiO₂ particles tended to decrease, while the amount of barium carbonate (BaCO₃) particles increased. By decreasing the precursor concentration or the residence time in the hot zone, both particle size and degree of aggregation of the particles produced decreased, but the amount of barium carbonate increased. At a Ba/Ti ratio of 2.3, spherical and highly crystalline cubic BaTiO₃ particles 27 nm in size with a narrow size distribution (σ_g = 1.33) were produced at 900°C.