JOURNAL OF CHEMICAL ENGINEERING OF JAPAN
Print ISSN : 0021-9592
Micro-patterning of Lead Zirconate Titanate Thin Films Seeded with Barium Strontium Titanate Nano-crystalline Particles by Photo-irradiation
Tomokazu TanaseAkira WatanabeYoshio KobayashiMikio KonnoTakao Miwa
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2004 Volume 37 Issue 5 Pages 609-613

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Abstract

Lead zirconate titanate (PZT) thin films seeded with barium strontium titanate (BST) nano-crystalline particles were fabricated on a Si wafer with a spin-coating technique. The BST particles synthesized with a sol-gel method were dispersed in an acetylacetone (chelating reagent) modified PZT precursor solution of complex alkoxides for the fabrication. The micro-patterns of the PZT film containing 50 mol% BST particles could be obtained by the direct photo-irradiation to the fabricated films for 40 min without any pre-heating treatments, while the PZT films in the absence of the BST particles required pre-heating treatment at 200°C for 10 s before the photo-irradiation. This suggested that the BST crystallines accelerated decomposition of the chelate compounds and subsequent polycondensation of PZT alkoxides.

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© 2004 The Society of Chemical Engineers, Japan
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