Journal of the Ceramic Society of Japan
Online ISSN : 1882-1022
Print ISSN : 0914-5400
ISSN-L : 0914-5400
Technical reports
Microstructure and Stress-Induced Phase Transformation of Sol-Gel Derived Zirconia Thin Films
Yutaka OHYAHiroki ISHIKAWATakayuki BAN
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2006 Volume 114 Issue 1329 Pages 411-414


Zirconium oxide thin films were fabricated using a sol-gel method. The sols were prepared using zirconium alkoxide and acetate. An alcoholic solution of the alkoxide and an aqueous solution of the acetate were dip-coated on a glass substrate and fired at 600°C. Both films were crystallized as the tetragonal phase, which was detected by an XRD and an electron beam diffraction of an ion-thinned section. On the other hand, the electron beam diffraction of the thin section of the film prepared by crushing in a mortar, exhibited the monoclinic phase, which was transformed by stresses applied during sample preparation for TEM. The SEM observation showed a grain size of 30-50 nm. The TEM micrographs exhibited contrasts of less than 10 nm size in a single grain of about 30 nm.

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© 2006 The Ceramic Society of Japan
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