Synthesis of Poly[(cyanophenyl)silylene-p-phenylene]s as Patternable Ceramics Precursors

Abstract

Poly(silylene-p-phenylene)s bearing cyanophenyl groups were prepared and their application to patternable precursors of conducting ceramic films was studied. When polymer films were irradiated in air through a photomask, then heated at high temperature, only the non-irradiated area was converted to conducting ceramic films with the conductivities of 1.1-2.2×10² S/cm, while the irradiated area became an insulator.