1986 年 94 巻 1085 号 p. 45-47
The formation of silicon carbide powder by carbonization of iminodisilanenitrile (Si2N3H) has been investigated. Submicron SiC powder was produced by heating the mixture of carbon black and amorphous Si2N3H for 0.5-4h at 1350°-1650°C under reduced pressure. The crystallinity of the products increased with increasing the reaction temperature and reaction time. The particles were spherical and had maximum size of 0.2-0.4μm in diameter. A reaction process consisting of the formation of Si3N4 particles as an intermediate and the subsequent carbonization was proposed for the formation of present SiC particles.