Effect of Additives on the Electrostatic Force of Alumina Electrostatic Chucks

Abstract

Ceramic electrostatic chucks made of alumina ceramics were fabricated. Transition metal oxides (1wt% TiO₂, Cr₂O₃, MnO₂, CoO, CuO) were added to control the resistance of the dielectric insulation layer of the chuck. The electrical resistivity and electrostatic force at R. T. -200°C were measured, and it was revealed that the electrostatic force of the chuck depends on the electrical resistance of the ceramic. Among the additives examined, TiO₂ was found to be most effective for increasing the adhesion force of the alumina electrostatic chuck.