NO₂ Sensing Properties of Thick Zn₂SnO₄ Film

Abstract

Thick Zn₂SnO₄ films have the highest sensitivities to NO₂ among the examined complex oxides with spinel structure. Although the NO₂-gas sensitivities of thick Zn₂SnO₄ films decrease with increasing temperature, high sensitivities are obtained in the temperature range of 573 to 673K. The sensitivities of the present Zn₂SnO₄ films are comparable to those of NO₂-sensitive oxides such as WO₃ and ZnO.