The change of microstructure and content of components with distance from the surface into the bulk was analyzed for Pr-doped ZnO ceramics as a function of sintering temperature and atmosphere. Pr was segregated at the grain boundary, however, the content was drastically changed by the sintering temperature and atmosphere. Below the liquid phase formation temperature (1350°C), Pr content was constant from the surface into the bulk for the sample sintered in O2, and Pr content was large at the surface region (0-50μm) for the sample sintered in N2. On the other hand, above the liquid phase formation temperature (1500°C), Pr content was lowered at the region between 0 and 300μm from the surface for the sample sintered in O2, and Pr content was large at the surface region (0-50μm) for the sample sintered in N2. This depth profile agreed well with the fraction of grain boundary area. The driving force to cause such Pr content change was ascribed to the increase of the vaporization content of Pr-oxide and ZnO in the sample.