In this study, a new microetching technique for the observation of ceramic surfaces by Penning discharge microsputtering is developed and applied to ceramic surfaces. Each ceramic surface was prepared by mechanical polishing and subsequent etching and the resultant surfaces were examined under both an optical and a scanning electron microscope. The results in the case of using with a gold target revealed high-definition images of the surface structure of the Si3N4, ZrO2 and Al2O3-ZrO2-Al6Si2O13 ceramics after surface etching using this process. However, in the case of using a gold target, high-purity Al2O3 ceramics and Al2O3-ZrO2 complex ceramics, the resultant surface preparation was unsuccessful. However, when using a titanium target, the procedure in both cases, was successful. This difference could be attributed to the difference in the effect of oxygen on both metals.