Journal of the Ceramic Society of Japan
Online ISSN : 1348-6535
Print ISSN : 1882-0743
Notes
Discharge property between magnesium oxide films with various true densities
Hidetoshi SAITOHAkihiro TAKANOShinnosuke KAWAGUCHITsukasa WASHIOShigeo OHSHIOHiroki AKASAKA
Author information
Keywords: MgO, Plasma, Density, XRR, CVD
JOURNALS FREE ACCESS

Volume 117 (2009) Issue 1366 Pages 780-782

Details
Download PDF (466K) Contact us
Abstract

MgO films were synthesized on stainless steel electrodes by a chemical-vapor-deposition method operated under atmosphere to reduce a discharge inception voltage in diode type discharge system under 6%Xe + 94%Ne atmosphere. The relationship between crystalline perfection of the MgO film and discharge inception voltage was investigated. In this study, crystalline perfection is quantified by the true density of the film. The discharge inception voltage was varied with the true density of the MgO film. The MgO film with 87% of the theoretical density indicated a minimum discharge inception voltage under various gas pressures and electrode distances.

Information related to the author
© 2009 The Ceramic Society of Japan
Previous article Next article
feedback
Top