抄録
(Bi0.5Na0.5)TiO3 (BNT) dense ceramic films with a thickness of approximately 25 µm were deposited by an aerosol deposition method, and thieir ferroelectric and leakage current properties were investigated. The BNT films annealed at 1100°C represented the leakage current density (J) of 10−6 A/cm2, while the BNT films annealed at 800 and 1000°C led to a marked decrease in J. The J of order of 10−7 A/cm2 was obtained for the films annealed at 1000°C. The ceramic films annealed at 1000°C showed a remanent polarization (Pr) of 27 µC/cm2 which was larger than that of the ceramic films annealed at 800°C (a Pr of 7.4 µC/cm2).