抄録
X-ray computed tomography (X-ray CT) was performed to evaluate defects in a joined silicon nitride sample. The resolution of the X-ray CT was about 10 µm. ZrO2 particles (ZrO2 was added as a sintering additive), segregation of Zr, and cracks were successfully observed. These defects were most likely introduced during the fabrication procedure, i.e., by insufficient milling of the ZrO2, separation of ZrO2 in the slurry, and cracking during drying after slip-casting. X-ray CT is demonstrated to be a useful evaluation method, since these defects are introduced not only by joining but also by usual ceramics processing.
