Structure and high-frequency soft-magnetic properties of Co–TiN nano-composite films

Abstract

The interest in the soft magnetic nano-composite films has grown to realize down-sized microelectronic devices at GHz frequency. In this study, the good soft magnetic Co–TiN nano-composite films were successfully prepared at room temperature (RT) by a sputtering method. XPS results prove that the Co in the films is pure metallic state. The nano-composite films show good frequency response of permeability, which resonance frequency is as high as 1.3 GHz. The films have high magnetic loss absorption (P_loss/P_in) around 1.5 GHz range, which have a high potential for noise suppressors in high frequency devices.