Journal of the Ceramic Society of Japan
Online ISSN : 1348-6535
Print ISSN : 1882-0743
ISSN-L : 1348-6535
Papers
Effects of dielectric film surface on oxygen diffusion
Jumpei SUZUKIKenji MATSUMOTOMinoru RYUYoshiki IWAZAKIToshimasa SUZUKIKen WATANABEMinako HASHIGUCHIIsao SAKAGUCHINaoki OHASHI
Author information
JOURNALS FREE ACCESS

2014 Volume 122 Issue 1426 Pages 410-414

Details
Abstract

The oxygen diffusivity in BaTiO3 thin films heteroepitaxially grown on SrTiO3 substrates was investigated using a gas/solid exchange technique with 18O-isotope-enriched gas. Deformation of the BaTiO3 lattice and inhibition of the oxygen diffusivity occurred simultaneously when the YSZ layer, which is assumed to be catalytic for the 18O/16O exchange reaction, was deposited on BaTiO3. The mechanism for the reduction in oxygen diffusivity due to the YSZ cover layer is discussed in terms of residual stress in the strained BaTiO3 layer.

Information related to the author
© 2014 The Ceramic Society of Japan
Previous article Next article
feedback
Top