2018 Volume 126 Issue 11 Pages 936-939
We proposed a novel method to evaluate strain components in PbTiO3 thin films using Raman spectroscopy. In this method, the strain components are calculated from peak shifts of three E(TO)-modes. The coefficients to calculate the strain components were decided via least square technique using experimental values for two-dimensional stress and hydrostatic pressure. The strain components that were estimated using the obtained coefficients were in good agreement with those measured by X-ray diffraction measurement (XRD). The average error between the strain components evaluated by XRD and Raman spectroscopy was about 0.05%.