Journal of the Ceramic Society of Japan
Online ISSN : 1348-6535
Print ISSN : 1882-0743
ISSN-L : 1348-6535
Regular Issue: Full papers
Anisotropic sintering shrinkage and microstructural evolution of c-axis-oriented Si3N4 ceramics
Takuma TAKAHASHIJunichi TATAMIHiromi NAKANOSatoshi TANAKA
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2019 Volume 127 Issue 6 Pages 435-442

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Abstract

High-thermal-conductivity Si3N4 ceramics are desired for substrates in SiC power devices. We successfully fabricated highly c-axis-oriented Si3N4 ceramic by casting in a rotating-magnetic field and then sintered using a conventional gas pressure. As a result, the c-axis orientation of Si3N4 grains effectively improves the thermal conductivity. The sintering behavior of c-axis-oriented Si3N4 ceramics was investigated. The linear shrinkage ratio in the c-axis-oriented direction was smaller than that in the direction normal to the c-axis-oriented direction. Fine c-axis-oriented structures resulted from the orientation of β-Si3N4 seeds during the casting because they played as templates controlling the grain growth of β-Si3N4 nuclei and inducing the anisotropic sintering shrinkage.

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© 2019 The Ceramic Society of Japan
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