SICE Journal of Control, Measurement, and System Integration
Online ISSN : 1884-9970
Print ISSN : 1882-4889
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Nano Robotic Manipulation inside Electron Microscopes
Toshio FUKUDAMasahiro NAKAJIMAPou LIU
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2008 Volume 1 Issue 1 Pages 40-50

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Abstract

We report nanomanipulation and nanoassembly through nanorobotic manipulation inside electron microscopes. A hybrid nanorobotic manipulation system, which is integrated with a nanorobotic manipulator inside a transmission electron microscope (TEM) and nanorobotic manipulators inside a scanning electron microscope (SEM), is used. The elasticity of a multi-walled CNT (MWNT) is measured inside a TEM. The telescoping MWNT is fabricated by peeling off outer layers through destructive fabrication process. The electrostatic actuation of telescoping MWNT is directly observed by a TEM. A cutting technique for CNTs assisted by the presence of oxygen gas is also presented. The cutting procedure was conducted in less than 1 minute using a low-energy electron beam inside a scanning electron microscope. A bending technique of a CNT assisted by the presence of oxygen gas is also applied for the 3-D fabrication of nanosturucture. We expect that these techniques will be applied for the rapid prototyping nanoassembly of various CNT nanodevices. For the nano-biological applications, environmental-SEM (E-SEM) nanomanipulation system is also presented with the direct observation of the hydroscopic samples with non-drying treatment.

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© 2008 The Society of Instrument and Control Engineers
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