Zairyo-to-Kankyo
Online ISSN : 1881-9664
Print ISSN : 0917-0480
ISSN-L : 0917-0480
Glow Discharge Optical Emission Spectrometry (GDS)
Ken-ichi Suzuki
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Keywords: glow discharge spectrometry, GDS, surface analysis, electroplated film, oxide film, ion implantation, corrosion, titanium, hydrogen absorption, insulation film
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1993 Volume 42 Issue 6 Pages 384-392

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Abstract

Principle, apparatus and measurement method of glow discharge optical emission spectrometry (GDS) have been described. Applications of GDS include surface analysis of electroplated film, oxide film, hydrogen absorption layer of titanium, implanted layer of steel, and insulation films.

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