表面界面に埋め込まれたナノスケール薄膜・ナノワイヤーの定量的構造研究

抄録

The grazing-angle X-ray standing wave（GAXSW）method for model-independent and atomic-scale determination of in-plane structures and X-ray reciprocal-space mapping（XRSM）at a sample angular position for quick structural estimation are discussed. The both have been developed for analysis of a nanoscale structure such as an adsorbed surface system and a buried nanoscale structure. They are synchrotron-based X-ray diffraction techniques, which use monochromatic parallel hard X-rays incident at a small angle close to the critical angle for total-external reflection. GAXSW's are dynamically formed by the interference of an incident, a specularly reflected, and a specularly diffracted beam above a sample surface. A Bragg condition is satisfied on lattice planes perpendicular to the surface. The author describes in-plane structural analyses of a surface system and a thin film. Outcomes of XRSM are briefly summarized for nanoscale structures of a surface, buried interfaces, and a thin film. In particular, results of nanoscale wires are mentioned.