We prepared oxyhydrides of the perovskite ATiO3 （A＝Ba, Sr, Ca） via low-temperature reduction using CaH2. The obtained oxyhydrides are stable against temperature as well as A-site substitution, and the hydride species are exchangeable with outer hydrogen gas, implying the hydride diffusion through the lattice. The exchange temperature depends on the A-site cation,and ranged from 380-460 ℃. Epitaxial thin films of these oxyhydrides were also fabricated. The films show a metallic conductivity.
