日本結晶学会誌
解説
電子線トモグラフィーによる格子欠陥の三次元観察
波多 聰光原 昌寿中島 英治池田 賢一佐藤 和久村山 光宏工藤 博幸宮崎 伸介古河 弘光
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ジャーナル フリー

57 巻 (2015) 5 号 p. 276-284

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Three-dimensionalization, i.e., direct representation or fabrication of three-dimensional (3D) objects, is now a key technology in various science and engineering fields. Electron microscopy, a vital nanoscale characterization tool, is no exception, thus various imaging methods have been developed to extend its imaging capabilities from conventional two dimensions to three dimensions. In this article, we focus on electron tomography (ET), which is a typical 3D imaging method using transmission electron microscopy (TEM) or scanning transmission electron microscopy(STEM), and overview the current status and future prospects of ET and an application of ET to 3D imaging of dislocations in crystalline materials as an practical example.

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© 2015 日本結晶学会
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