連載企画 世界の放射光施設を使ってみよう
放射光ナノビームX線回折による結晶評価の現状
2019 年 61 巻 1 号 p. 51-55
詳細
2019 年 61 巻 1 号 p. 51-55
Synchrotron radiation X-rays can be focused to 100 nm order in beam size taking advantage of its high brilliance and development of X-ray optical devices. We have been performing crystal quality assessment in high-spatial-resolution by X-ray diffraction using the focused X-rays. Our main target samples are single crystalline thin films grown on substrates, nano structure like super-lattice or semiconductor devices. We report the synchrotron nanobeam X-ray diffraction system at SPring-8 and typical recent results.
