Recent studies in surface structure analysis by means of ion beams are reviewed. At first, it is introduced to get informations on the surface structures in real space, surface relaxation effect and the thermal amplitude of surface atoms by measuring the“surface peak”which is observed in axial channeling spectra of the Rutherford backscattered ions. The low energy ion beam (<10 keV) which is not neutralized by scattering only at crystal surface is also useful for structure analysis of surface layer of foreign atoms. At last studies on the surface channeling, where the incident ions enter a crystal with small glancing angle, are summerized.
