日本結晶学会誌
Online ISSN : 1884-5576
Print ISSN : 0369-4585
ISSN-L : 0369-4585
分析電子顕微鏡―EELSを中心として―
市ノ川 竹男
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ジャーナル フリー

1983 年 25 巻 1 号 p. 64-78

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The principle of electron energy loss spectroscopy (EELS) is discussed based on the dielectric function of solid specimen. Electron energy loss spectra in low (<50eV) and high energy loss regions (>50eV) are analysed for graphite and explained by its electronic band structure. Limitations of the spatial resolution and the detectable mass concentration by EELS in TEM are discussed from the point of view of local chemical analysis. The mapping techniques and images formed by characteristic energy losses of each element contained within the specimen are shown for some examples. In addition to EELS in TEM, other examples of EELS in SEM are shown for surface analysis of bulk specimen.

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