1983 年 25 巻 1 号 p. 64-78
The principle of electron energy loss spectroscopy (EELS) is discussed based on the dielectric function of solid specimen. Electron energy loss spectra in low (<50eV) and high energy loss regions (>50eV) are analysed for graphite and explained by its electronic band structure. Limitations of the spatial resolution and the detectable mass concentration by EELS in TEM are discussed from the point of view of local chemical analysis. The mapping techniques and images formed by characteristic energy losses of each element contained within the specimen are shown for some examples. In addition to EELS in TEM, other examples of EELS in SEM are shown for surface analysis of bulk specimen.