Preparation and properties of superconducting oxide thin films are described. (La1-xSrx) 2 CuO4 (LSCO) and Ba2YCu3O7-σ (BYCO) can be epitaxially grown on (100) and (110) SrTiO3 single crystal substrates by magnetron sputtering method. Anisotropic properties of BYCO are measured by using thin films deposited on the (110) plates. The critical current density along the CuO layers has reached 1.8×106A/cm2 at 77.3k. This current density is adequate for device applications.