8.X線多結晶回折法による薄膜の解析
1992 年 34 巻 2 号 p. 110-117
詳細
1992 年 34 巻 2 号 p. 110-117
The application of the X-ray powder diffraction technique for the characterization of thin films is descussed. The conventional powder diffraction method can be used for the microstructure analysis, and the specular reflection method for the layer-structure analysis of thin films. Results on the characterization of selected single- and multiple-layer thin films are presented to illustrate the types of information that can be obtained with the methods.
