1995 年 37 巻 2 号 p. 112-117
Crystal structure and superconductivity of YBa2Cu3O7-δ thin films were investigated as functions of oxygen contents and growth temperatures. An effective method for the quantita-tive determination of oxygen content from X-ray diffraction intensity ratio was established through systematic studies on the structural change of the oxygen deficient films. Dependence of cation disorder and Tc on growth temperature, as well as post-annealing temperature has also been obtained. The results suggest an intrinsic relation existing between structure and superconductivity.