Sub-電子ビームによる高分解能STEM
2005 年 47 巻 1 号 p. 26-31
詳細
2005 年 47 巻 1 号 p. 26-31
The scanning transmission electron microscope (STEM) with an annular dark-field (ADF) detector provides atomic-resolution incoherent images, whose resolution is dominated, to a good approximation, by the size of convergent electron beams. Improving a spherical aberration of microscope objective lenses has been successful in converging the beam into sub-A scale, promising a remarkably higher resolution for STEM. Here we describe the performance of aberration-corrected 300kV-STEM - the world-best STEM available today. The results clearly demonstrate that a sub-Ångstrom resolution has been indeed achieved for not only simple structures but also structurally complex systems (quasicrystals) .
