日本結晶学会誌
Online ISSN : 1884-5576
Print ISSN : 0369-4585
ISSN-L : 0369-4585
X線逆格子イメージング法を用いた表界面ナノ構造評価
坂田 修身吉本 護三木 一司中村 将志舟窪 浩
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2007 年 49 巻 5 号 p. 292-299

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We have developed a nondestructive analysis method, which is named X-ray reciprocallattice space imaging, based on synchrotron diffraction for quickly characterizing a crystalline nanometer-scale structure in a non-vacuum environment. The basic idea behind the method is that the reciprocal lattice of 1 D or 2D structures are an array of sheets or rods, respectively. Thus the reciprocal-lattice space can be recorded for a fixed sample with a 2D X-ray detector fixed. We successfully demonstrated that the method was applicable to structural evaluation of ultrathin NiO wires on a sapphire surface in air, Bi nanolines buried in Si, an interfacial structure of a Au electrode in solution, and a thinfilm of Bi4Ti3O12.

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