Temperature measurement is one of the most fundamental techniques to proceed cryogenic experiment. Especially, information on temperature distribution is quite useful to know flow pattern of nuclear boiling fluid. To carry out the distribution measurement, a large number of sensors are required accompanying with huge number of data transfer wires. However, the complex wirings always lead to poor reliability of the measurement system. This paper proposes a new method for temperature distribution measurement in cryogenic fluid with Si diodes matrix as thermo-sensors. The data scanning method is introduced to solve huge wirings problem. In the paper, 64 points (8×8) diodes matrix distrubution sensor is manufactured as a prototype system, which is operated in cryogenic GN2 flow to assess its availability.