トリフルオロ酢酸 (TFA) を用いるMetalorganic deposition (MOD) 法によるYBCO成膜とプロセス条件
2000 年 35 巻 11 号 p. 516-522
詳細
2000 年 35 巻 11 号 p. 516-522
Fabrication of YBCO superconductor by the MOD method has many advantages: precise controllability of metal components, wide flexibility to coating objects, and low-cost nonvacuum approach. We succeeded in the preparation of a high-quality coating solution that enables us to obtain YBCO films having high critical currents (Ic). We also investigated processing conditions: proper control of water vapor in furnace, suppression of the reaction between substrate and fluoride during heat treatments, and other process conditions. By their optimization, we can successfully fabricate the film, which has Jc of 4.6MA/cm2 at 77K, 0T. The results show the potentiality of the TFA-MOD method for high-temperature superconductor applications.
