2012 年 43 巻 5 号 p. 117-121
The purpose of this study is the development of a valve that can precisely control pneumatic cylinders. The valve is lightweight and has simple structure. The valve uses a piezoelectric oscillator which is driven in the resonance mode, and it can control flow rate by controlling the amplitude of the particle excitation. In this report, we have designed a new prototype for the purpose of high controllability. We have applied a non-linear control algorithm to control Q-V nonlinearlity of this valve. We found that this control works well to realize linear Q-V characteristics.