JOURNAL OF THE ILLUMINATING ENGINEERING INSTITUTE OF JAPAN
Online ISSN : 1349-838X
Print ISSN : 0019-2341
ISSN-L : 0019-2341
Preparation of the III Group Nitrogen Compounds Films by MetalOrganic Chemical Vapor Depositon
Tetsuya Aikawa, [in Japanese], [in Japanese]
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2001 Volume 85 Issue Appendix Pages 237

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