日本金属学会誌
Online ISSN : 1880-6880
Print ISSN : 0021-4876
ISSN-L : 0021-4876
EB-PVD法によって合成したナノ構造ジルコニア膜の熱物性に及ぼす多層化の影響
張 炳國吉矢 真人松原 秀彰
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2005 年 69 巻 1 号 p. 56-60

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  This work describes the experimental results of thermal conductivity and thermal diffusivity of the multi-layered ZrO2-4 mol%Y2O3 (YSZ) film to develop the low thermal conductive thermal barrier coating. YSZ films with 2~5 layers were deposited on zirconia substrates by Electron Beam-Physical Vapor Deposition (EB-PVD). The YSZ layers consist of porous-columnar grains containing nano-pores. It is noted that multi layers contain residual pores at interface between layers. Density and thermal diffusivity of the multi-layered YSZ film decreased with increasing the number of layers. Consequently, the thermal conductivity of films decreased with increasing the number of layers. The decrease of thermal conductivity in multi layers is caused by increase of total porosity due to increase of the layer-interface pores, resulting the increase of the phonon scattering.
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© 2005 (公社)日本金属学会
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