2020 Volume 84 Issue 4 Pages 121-127
Electron vortex beams are considered as probes for next generation electron beam instruments with unprecedented measurement capabilities because vortex beams carry intrinsic orbital angular momenta. In order to clarify the performance of vortex beams, we generated vortex beams by using fork-shaped gratings manufactured by focused ion beam instruments. In vortex beam generation experiment, we found that shapes and sizes of grating openings were superimposed on rings of diffraction spots, typical behavior of vortex beams. This paper discusses experimental results on the generation and control of vortex beams by changing grating opening shapes and sizes.