日本結晶成長学会誌
Online ISSN : 2187-8366
Print ISSN : 0385-6275
ISSN-L : 0385-6275
カスプ磁場印加法により育成したSi単結晶中の酸素濃度変動
渡辺 匡人江口 実日比谷 孟俊
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1997 年 24 巻 2 号 p. 87-

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The relationship between fluctuation of oxygen concentration in Si crystals grown under the cusped magnetic field and Simelt flow during crystal growth is discussed. In the case of the center of cusped magnetic field benefited the melt surface, growth striation resulting from fluctuation of oxygen concentration appeared in the grown crystal. In this configuration, random temperature oscillation was also observed. This means that unstable melt flow is generated under the crystal/melt interface and this flow causes fluctuation of oxygen concentration in grown crystals.

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© 1997 日本結晶成長学会
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