半導体表面反応の分子シミュレーション : バーチャルマイクロスコープの開発と応用 : バルク成長シンポジウム

抄録

Molecular simulations based on the molecular orbital theory became useful to study the mechanism of surface reactions of simi-conductor. In this presentation, results of the molecular orbital calculations on Ti plasma enhanced CVD are reported and also, as a future image of such molecular simulations, a new system named virtual microscope is introduced.