2002 年 29 巻 2 号 p. 33-
InN films grown on (0001) sapphire substrate tend to have metastable rotation domains within c-plane due to the latticemismatchbetweenltiNandsapphireandduetothesubstratestructure. Initial growth processes of substrate nitridation and buffer layer deposition are useful and effective way to control the rotation domains.