In order to clarify the characteristic of nanoparticle, temperature dependence of SiO_2 particle deposited Al clusters have been analyzed by transmission electron microscope. We produced Al clusters deposited SiO_2 nanoparticles. We found that a part of Al clusters changed to ν-Al_2O_3 crystalline phase at 600℃ and SiO_2 nanoparticles started to sublimate as SiO gas at 800℃.
