26aB07 ECR-MBE法による石英ガラス基板上多結晶InN成長(窒化物(2),第34回結晶成長国内会議)
2004 年 31 巻 3 号 p. 210-
詳細
2004 年 31 巻 3 号 p. 210-
ECR-MBE growth of InN on silica glass by ECR-MBE was studied. The InN grown on silica glass showed c-axis oriented polycrystalline with random α-axis orientation. LT-InN buffer layer improved the surface morphology and c-axis orientation of the poly-InN. (0002) X-ray rocking curve of the poly-InN with a FWHM of about 3.4゜ was obtained.
