【特 集】洗浄・浄化(2)
ベンチュリ管式微細気泡生成装置を利用した低環境負荷洗浄技術
キーワード:
Venturi tube,
Microbubble,
Ozone gas,
Photoresist removal,
Water treatment,
Low environmental load
2018 年 32 巻 2 号 p. 231-238
詳細
2018 年 32 巻 2 号 p. 231-238
Chemical solvents used for industrial washing process have a negative impact on the environment and the health of their users, and they are high-cost cleaning. In order to reduce the amount of chemical solvent used in the washing process, the non-chemical washing technology with microbubble is expected. We focus on the microbubble generator with a Venturi tube. This generator can generate the bubbles of hundred-micrometer diameter in high void fraction. And it is maintenance-free because of its simple structure. In this paper, authors introduce capability of oil washing with microbubbles generated using a Venturi tube and photoresist removal with Ozone microbubbles, which is friendly for the environment and no harm to the product.
